Design considerations for multilayer-coated Schwarzchild objectives for the XUV

Jeffrey B. Kortright; James H. Underwood

doi:10.1117/12.23182

1 February 1991 Design considerations for multilayer-coated Schwarzchild objectives for the XUV

Jeffrey B. Kortright, James H. Underwood

Proceedings Volume 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography; (1991) https://doi.org/10.1117/12.23182
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

The performance of multilayer-coated Schwarzschild objectives, and similar near normal incidence soft xray focussing systems, can be affected by the changing angles of incidence for different rays and possible variations in multilayer period across the curved mirror surfaces. A design analysis which considers these issues is presented, using as an example a 20 times demagnifying Schwarzschild objective coated with molybdenum/silicon multilayers for operation at roughly 76 eV. The large bandwidth of these multi].ayers eases requirements on control of the variation of the d-spacing for the system considered. Implications for extension to similar systems operating with different magnifications, sizes, and photon energies are discussed.

Citation Download Citation

Jeffrey B. Kortright and James H. Underwood "Design considerations for multilayer-coated Schwarzchild objectives for the XUV", Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, (1 February 1991); https://doi.org/10.1117/12.23182

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available