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A compact Penning discharge VUV and soft x-ray source has been developed. It consists of a water cooled brass anode two changeable cathode inserts and two permanent magnets to produce the necessary homogeneous magnetic field along the direction of discharge axis. Argon nitrogen and helium are used as working gases with the dynamic pressure centered at 5. 0 x103 Torr. Experiments of using different cathode inserts were carried out for determining the suitable cathodegas pair. The source can produce a great nurnbr of bright lines in the VUV and soft x-ray region from 50 to 1000 A. The most useful lines are however the highly ionized aluminum and magnesium (cathode inserts material) lines below 300 A. This source has been intensively employed in our research programs and the stability shown in these applications is better than 5 within an hour. 1.
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