A Review Of Optical Property Measurements Using Ellipsometry

Thomas H. Allen

doi:10.1117/12.956267

26 September 1978 A Review Of Optical Property Measurements Using Ellipsometry

Thomas H. Allen

Proceedings Volume 0140, Optical Coatings: Applications and Utilization II; (1978) https://doi.org/10.1117/12.956267
Event: 1978 Technical Symposium East, 1978, Washington, D.C., United States

Abstract

The application of ellipsometry to optical measurement problems encountered in the optical coating industry will be discussed. Although ellipsometry has been demonstrated to be a sensitive and accurate technique for measuring the optical properties of surface films and bulk materials, it has not been widely used in this industry. Specific measurements that will be discussed are: thickness and optical constants of films, optical constants of bulk materials, and stress-birefringence. Special precautions and errors caused by thin film surface contaminants will be described. Finally the applicability of ellipsometry to in-situ measurements and deposition monitoring will be reviewed.

Citation Download Citation

Thomas H. Allen "A Review Of Optical Property Measurements Using Ellipsometry", Proc. SPIE 0140, Optical Coatings: Applications and Utilization II, (26 September 1978); https://doi.org/10.1117/12.956267

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available