Electrical and optical properties of sprayed indium tin oxide films

V. Vasu; A. Subrahmanyam

doi:10.1117/12.56982

1 February 1992 Electrical and optical properties of sprayed indium tin oxide films

V. Vasu, A. Subrahmanyam

Proceedings Volume 1523, Conference on Physics and Technology of Semiconductor Devices and Integrated Circuits; (1992) https://doi.org/10.1117/12.56982
Event: Conference on Physics and Technology of Semiconductor Devices and Integrated Circuits, 1992, Madras, India

Abstract

The electrical and optical properties of sprayed indium tin oxide (ITO) films have been reported as a function of substrate temperature and tin concentration. Highly conducting (approximately equals 1 X 10⁴ mho/cm) and transparent (approximately equals 90% in the visible region) ITO films were obtained when the substrate temperature is 420 degree(s)C with 5% by weight of tin. The refractive index of the films varies from 1.9 to 2.2.

Citation Download Citation

V. Vasu and A. Subrahmanyam "Electrical and optical properties of sprayed indium tin oxide films", Proc. SPIE 1523, Conference on Physics and Technology of Semiconductor Devices and Integrated Circuits, (1 February 1992); https://doi.org/10.1117/12.56982

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