Determination of thin-film roughness and volume structure parameters from light-scattering investigations

Angela Duparre; Samer Kassam

doi:10.1117/12.50526

1 December 1991 Determination of thin-film roughness and volume structure parameters from light-scattering investigations

Angela Duparre, Samer Kassam

Author Affiliations +

Proceedings Volume 1530, Optical Scatter: Applications, Measurement, and Theory; (1991) https://doi.org/10.1117/12.50526
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

Light scattering measurements can be used for determining roughness as well as volume structure parameters of optical thin films. A method of structural analysis is outlined, which allows a quantitative estimation of roughness parameters, mean columnar diameter, packing density, and the evolutionary exponent, respectively.

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Angela Duparre and Samer Kassam "Determination of thin-film roughness and volume structure parameters from light-scattering investigations", Proc. SPIE 1530, Optical Scatter: Applications, Measurement, and Theory, (1 December 1991); https://doi.org/10.1117/12.50526

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