High-resolution surface plasmon measurements: a sensitive probe for thickness and structural information of ultrathin films

Uwe Albrecht; H. Dilger; P. Evers; Paul Leiderer

doi:10.1117/12.56648

1 January 1992 High-resolution surface plasmon measurements: a sensitive probe for thickness and structural information of ultrathin films

Uwe Albrecht, H. Dilger, P. Evers, Paul Leiderer

Author Affiliations +

Proceedings Volume 1594, Process Module Metrology, Control and Clustering; (1992) https://doi.org/10.1117/12.56648
Event: Microelectronic Processing Integration, 1991, San Jose, CA, United States

Abstract

We describe the use of optically excited surface plasmons to measure the thickness of ultrathin films deposited on gold and silver surfaces with submonolayer resolution. Additional structural information on the film is obtained by looking at the scattering of the surface plasmons. Applications of this method to physisorbed and quench-condensed molecular hydrogen films and to spreading of liquids are presented.

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Uwe Albrecht, H. Dilger, P. Evers, and Paul Leiderer "High-resolution surface plasmon measurements: a sensitive probe for thickness and structural information of ultrathin films", Proc. SPIE 1594, Process Module Metrology, Control and Clustering, (1 January 1992); https://doi.org/10.1117/12.56648

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