Factors in the design and selection of vibration-sensitive equipment

Norman Owen; Reuben Hale

doi:10.1117/12.56825

1 February 1992 Factors in the design and selection of vibration-sensitive equipment

Norman Owen, Reuben Hale

Proceedings Volume 1619, Vibration Control in Microelectronics, Optics, and Metrology; (1992) https://doi.org/10.1117/12.56825
Event: SPIE Technical: OPTCON '91, 1991, San Jose, CA, United States

Abstract

The microelectronics industry must address a number of important issues when attempting to avoid vibration problems in the design and selection of vibration-sensitive equipment. An effective design methodology is described. Vibration requirements from selected vendors are compared and found to vary greatly in both form and content. Two different proposed vibration ''standards'' are compared.

Citation Download Citation

Norman Owen and Reuben Hale "Factors in the design and selection of vibration-sensitive equipment", Proc. SPIE 1619, Vibration Control in Microelectronics, Optics, and Metrology, (1 February 1992); https://doi.org/10.1117/12.56825

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