Scanning confocal microscopy for measuring diameter and linewidth: numerical modeling

Gregory E. Obarski; Timothy J. Drapela; Matthew Young

doi:10.1117/12.58272

1 April 1992 Scanning confocal microscopy for measuring diameter and linewidth: numerical modeling

Gregory E. Obarski, Timothy J. Drapela, Matthew Young

Proceedings Volume 1640, Time-Resolved Laser Spectroscopy in Biochemistry III; (1992) https://doi.org/10.1117/12.58272
Event: OE/LASE '92, 1992, Los Angeles, CA, United States

Abstract

The image of a circular edge was calculated as determined by a scanning confocal microscope with fully coherent illumination. In scalar theory, the quarter-intensity point locates the geometrical-optics image of a straight edge. For a circular object, however, the quarter- intensity point is displaced from the geometrical-optics image of the edge according to the diameter of the object. For example, for an object that has a diameter of 21 resolution limits the displacement error is approximately 0.01 resolution limits. The error that results from locating the quarter-intensity point for diameters as small as 1 resolution limit is given. The error is even greater if the object is scanned off-axis. For example, the error for an object whose diameter is 21 resolution limits and which is scanned 3 resolution limits off-axis is approximately 0.45 resolution limits. Finally errors are calculated for vertical lines of width as small as 1 resolution limit.

Citation Download Citation

Gregory E. Obarski, Timothy J. Drapela, and Matthew Young "Scanning confocal microscopy for measuring diameter and linewidth: numerical modeling", Proc. SPIE 1640, Time-Resolved Laser Spectroscopy in Biochemistry III, (1 April 1992); https://doi.org/10.1117/12.58272

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