Evaluation of a laser-based proximity x-ray stepper

George K. Celler; John Frackoviak; Richard R. Freeman; Charles W. Jurgensen; R. R. Kola; Anthony E. Novembre; Larry F. Thompson; Lee E. Trimble; David N. Tomes

doi:10.1117/12.136015

9 July 1992 Evaluation of a laser-based proximity x-ray stepper

George K. Celler, John Frackoviak, Richard R. Freeman, Charles W. Jurgensen, R. R. Kola, Anthony E. Novembre, Larry F. Thompson, Lee E. Trimble, David N. Tomes

Author Affiliations +

Proceedings Volume 1671, Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing II; (1992) https://doi.org/10.1117/12.136015
Event: Microlithography '92, 1992, San Jose, CA, United States

Abstract

Preliminary evaluation of a 1:1 proximity x-ray stepper, built by Hampshire Instruments is discussed here. This stepper, model 5000P, is the first commercial system that uses a laser- generated plasma x-ray source. It was extensively tested at the supplier's facility and in July 1991 it was shipped to AT&T Bell Labs, where its installation is nearly completed.

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George K. Celler, John Frackoviak, Richard R. Freeman, Charles W. Jurgensen, R. R. Kola, Anthony E. Novembre, Larry F. Thompson, Lee E. Trimble, and David N. Tomes "Evaluation of a laser-based proximity x-ray stepper", Proc. SPIE 1671, Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing II, (9 July 1992); https://doi.org/10.1117/12.136015

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