Laser absorption IR spectrometer for molecular analysis of high-purity volatile substances: detection of trace water concentrations in oxygen, argon, and monogermane

Grigory G. Devyatykh; G. A. Maksimov; Alexander I. Nadezhdinskii; V. A. Khorshev; S. M. Shapin

doi:10.1117/12.58685

1 April 1992 Laser absorption IR-spectrometer for molecular analysis of high purity volatile substances - Detection of trace water concentrations in oxygen, argon and monogermane

Grigory G. Devyatykh, G. A. Maksimov, Alexander I. Nadezhdinskii, V. A. Khorshev, S. M. Shapin

Author Affiliations +

Proceedings Volume 1724, Tunable Diode Laser Applications; (1992) https://doi.org/10.1117/12.58685
Event: Tunable Diode Laser Applications, 1993, Moscow, Russian Federation

Abstract

A setup is reported for molecular analysis of ultrapure volatile substances based on absorption two-channel computerized IR spectrometry with pulsed tunable injection lasers operating within the wavelength range from 4 to 12 microns. The setup is equipped with a heated vacuum system for gas supply and for gas mixtures preparation. Analytic characteristics are estimated in case of water detection in oxygen, argon, and monogermane; the detection limit is 8 x 10 exp -7 vol pct, 4 x 10 exp -7 vol pct, and 4 x 10 exp -7 vol pct, respectively.

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Grigory G. Devyatykh, G. A. Maksimov, Alexander I. Nadezhdinskii, V. A. Khorshev, and S. M. Shapin "Laser absorption IR-spectrometer for molecular analysis of high purity volatile substances - Detection of trace water concentrations in oxygen, argon and monogermane", Proc. SPIE 1724, Tunable Diode Laser Applications, (1 April 1992); https://doi.org/10.1117/12.58685

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