High average power XeCl excimer laser

Bernard Lacour; Henri Brunet; Herve Besaucele; Claude Gagnol

doi:10.1117/12.144666

4 May 1993 High average power XeCl excimer laser

Bernard Lacour, Henri Brunet, Herve Besaucele, Claude Gagnol

Proceedings Volume 1810, 9th International Symposium on Gas Flow and Chemical Lasers; (1993) https://doi.org/10.1117/12.144666
Event: Ninth International Symposium on Gas Flow and Chemical Lasers, 1992, Heraklion, Greece

Abstract

We have developed a high repetition rate, high average power excimer laser intended for industrial applications. The system operates in the phototriggered mode and is capable of continuous operation at repetition rates up to 700 Hz. A compact closed loop gas recirculation system, driven by two centrifugal blowers is employed, providing gas flow velocities up to 35 m/s. The laser delivers a maximum average output power of more than 500 W at 308 nm wavelength.

Citation Download Citation

Bernard Lacour, Henri Brunet, Herve Besaucele, and Claude Gagnol "High average power XeCl excimer laser", Proc. SPIE 1810, 9th International Symposium on Gas Flow and Chemical Lasers, (4 May 1993); https://doi.org/10.1117/12.144666

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