Partial coherence theory of multilayer thin-film optical properties

Klaus Richter; Chang-ho Chen; Chang-Lin Tien

doi:10.1117/12.145545

28 May 1993 Partial coherence theory of multilayer thin-film optical properties

Klaus Richter, Chang-ho Chen, Chang-Lin Tien

Proceedings Volume 1821, Industrial Applications of Optical Inspection, Metrology, and Sensing; (1993) https://doi.org/10.1117/12.145545
Event: Applications in Optical Science and Engineering, 1992, Boston, MA, United States

Abstract

Based on the theory of partially coherent light, an analytical scheme is established to determine the radiative properties of multilayer thin films. An accurate knowledge of the magnitude of interference effects is absolutely indispensable when measurements of the spectral transmissivity and reflectivity of thin films are used to derive optical constants of the film material. As illustrated by experiments, in many cases of practical interest neither a geometrical nor a wave optics model gives satisfactory results. A general formulation is introduced that covers this intermediate, partially coherent regime as well as the limiting cases of geometrical and wave optics. The complex degree of coherence provides a direct measure of the varying influence of interference effects on spectral measurements. An analytical approximation of the numerical approach is developed that gives a good physical understanding of the occurring phenomena. Experiments on the transmissivity of one- and two-layer films using a Fourier-transform infrared spectrometer in the medium infrared range ((lambda) equals 2 - 20 micrometers ) confirm the theoretical approach and the relevance of the addressed issue.

Citation Download Citation

Klaus Richter, Chang-ho Chen, and Chang-Lin Tien "Partial coherence theory of multilayer thin-film optical properties", Proc. SPIE 1821, Industrial Applications of Optical Inspection, Metrology, and Sensing, (28 May 1993); https://doi.org/10.1117/12.145545

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