Helios compact synchrotron x-ray source: one year of operation at ALF

David E. Andrews; Charles N. Archie

doi:10.1117/12.146517

24 June 1993 Helios compact synchrotron x-ray source: one year of operation at ALF

David E. Andrews, Charles N. Archie

Proceedings Volume 1924, Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing III; (1993) https://doi.org/10.1117/12.146517
Event: SPIE'S 1993 Symposium on Microlithography, 1993, San Jose, CA, United States

Abstract

The first Helios compact synchrotron x-ray source began routine operation at the IBM Advanced Lithography Facility (ALF) in East Fishkill, NY, in January of 1992. This paper presents data on the ring's performance during its initial fourteen months of operation.

Citation Download Citation

David E. Andrews and Charles N. Archie "Helios compact synchrotron x-ray source: one year of operation at ALF", Proc. SPIE 1924, Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing III, (24 June 1993); https://doi.org/10.1117/12.146517

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available