Properties of thin SiC membrane for x-ray mask

Tsutomu Shoki; Hiroyuki Nagasawa; Hiroyuki Kosuga; Yoichi Yamaguchi; Noromichi Annaka; Isao Amemiya; Osamu Nagarekawa

doi:10.1117/12.146526

24 June 1993 Properties of thin SiC membrane for x-ray mask

Tsutomu Shoki, Hiroyuki Nagasawa, Hiroyuki Kosuga, Yoichi Yamaguchi, Noromichi Annaka, Isao Amemiya, Osamu Nagarekawa

Proceedings Volume 1924, Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing III; (1993) https://doi.org/10.1117/12.146526
Event: SPIE'S 1993 Symposium on Microlithography, 1993, San Jose, CA, United States

Abstract

We have investigated the effects of film thickness, anti-reflective (AR) coating and surface roughness on the optical transparency of silicon carbide (SiC) membrane. Peak transmittances monotonously increased as the thickness decreased. The transmittance at 633 nm for 1.05 micrometers thick SiC membrane adjusted by reactive ion etching was 70%, and increased up to 80% by an AR coating. SiC membrane with extremely smooth surface of 0.12 nm (Ra) has been obtained by polishing, and had peak transmittances of 69% and 80% at 633 nm for 2.0 micrometers and 1.0 micrometers in thickness, respectively. Poly-crystalline (beta) -SiC membrane in the suitable tensile stress range of 0.3 to 2.0 X 10⁸ Pa and with high Young's modulus of 4.5 X 10¹¹ Pa has been prepared by a hot wall type low pressure chemical vapor deposition, and been found to need to have thickness over 0.7 micrometers to maintain sufficient mechanical strength in processing.

Citation Download Citation

Tsutomu Shoki, Hiroyuki Nagasawa, Hiroyuki Kosuga, Yoichi Yamaguchi, Noromichi Annaka, Isao Amemiya, and Osamu Nagarekawa "Properties of thin SiC membrane for x-ray mask", Proc. SPIE 1924, Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing III, (24 June 1993); https://doi.org/10.1117/12.146526

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available