A new thermoplastic holographic camera

F. Carreno

doi:10.1117/12.2308843

23 July 1993 A new thermoplastic holographic camera

F. Carreno

Proceedings Volume 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology; 1983BS (1993) https://doi.org/10.1117/12.2308843
Event: 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1993, Budapest, Hungary

Abstract

An optical heterodyne prof ilometer system for surface roughness measurement in industry environment is presented. Common path system was employed to eliminate the influence of sample vibration. The effect of mechanical instability and frequency drift is also eliminated. The vertical resolution is 0.4 nm. The lateral resolution is 1.5 um. The accuracy is 4 nm.

Citation Download Citation

F. Carreno "A new thermoplastic holographic camera", Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1983BS (23 July 1993); https://doi.org/10.1117/12.2308843

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