Heterodyne interferometry with Brillouin waves

Juergen Czarske

doi:10.1117/12.2308862

23 July 1993 Heterodyne interferometry with Brillouin waves

Juergen Czarske

Proceedings Volume 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology; 1983CB (1993) https://doi.org/10.1117/12.2308862
Event: 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1993, Budapest, Hungary

Abstract

There are many branches of high technologes (such as optoelectronics and semiconductory), which widely use methods of operational or finish nondestructive inspection. Laser scanning microscoping (LSM) is one of such optical methods. LSM gives us unique information about properties and quality of materials and structures in photometrical and OBIC (optical beam induced current) modes. In this paper the possibilities of inspection by original LSM-device RASTR-2M were illustrated. The objects of investigation were solid semiconductor materials and photosensor structures (photodetectores and sun batteries).

Citation Download Citation

Juergen Czarske "Heterodyne interferometry with Brillouin waves", Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1983CB (23 July 1993); https://doi.org/10.1117/12.2308862

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