Application of pyroelectric P(VDF/TrFE) thin films in integrated sensors and arrays

Norbert Neumann; Reinhard Koehler

doi:10.1117/12.164948

7 December 1993 Application of pyroelectric P(VDF/TrFE) thin films in integrated sensors and arrays

Norbert Neumann, Reinhard Koehler

Proceedings Volume 2021, Growth and Characterization of Materials for Infrared Detectors; (1993) https://doi.org/10.1117/12.164948
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

Spin coating is a simple method to produce thin copolymer films. By melting and slowly cooling a high rate of (beta) form polar crystallites can be obtained in the films, which was confirmed by X-ray diffraction patterns. By poling at bias fields above 100 V/micrometers , a high spontaneous polarization, and a high pyroelectric coefficient, low dielectric constants and dielectric losses can be achieved. The spontaneous polarization and the Curie point increase with rising context of VDF, while pyroelectric coefficient and dielectric constant decreases. Compositions with a VDF molar content of 70% to 80% are best suited for applying to pyroelectric sensors. the chosen P(VDF/TrFE) shows a spontaneous polarization of 8 (mu) Ccm^-2 and a pyroelectric coefficient of 3.5 nCcm^-2K^-1, a dielectric constant of 8 and a dielectric loss of about 0.018 at 25 degree(s)C. With the help of a computer simulation, the optimum sensor design was achieved in the case of single-element sensors and linear arrays. The care is a self-supporting carrier membrane of about 500 nm Si₃N₄ and 150 mm SiO₂, made by backside etching of silicone with a spin coated (1 - 2) micrometers thick P(VDF/TrFE) film. Built up single-element sensors and linear arrays distinguish themselves by a high voltage responsivity and a high signal-to-noise ratio. They are quite comparable to common sensors of lithium tantalate.

Citation Download Citation

Norbert Neumann and Reinhard Koehler "Application of pyroelectric P(VDF/TrFE) thin films in integrated sensors and arrays", Proc. SPIE 2021, Growth and Characterization of Materials for Infrared Detectors, (7 December 1993); https://doi.org/10.1117/12.164948

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available