Characterization of Ch-plasmas with CSR based microwave spectrometers

F. Wolf

doi:10.1117/12.2298651

30 August 1993 Characterization of Ch-plasmas with CSR based microwave spectrometers

F. Wolf

Proceedings Volume 2104, 18th International Conference on Infrared and Millimeter Waves; 210463 (1993) https://doi.org/10.1117/12.2298651
Event: 18th International Conference on Infrared and Millimeter Waves, 1993, Colchester, United Kingdom

Abstract

In this paper the experimental analysis of plasmas suitable for thin film deposition using a highresolution mm-wave spectrometer is reported.

Citation Download Citation

F. Wolf "Characterization of Ch-plasmas with CSR based microwave spectrometers", Proc. SPIE 2104, 18th International Conference on Infrared and Millimeter Waves, 210463 (30 August 1993); https://doi.org/10.1117/12.2298651

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