Holographic testing of relief with submicron accuracy

Yuri N. Zakharov

doi:10.1117/12.165405

10 December 1993 Holographic testing of relief with submicron accuracy

Yuri N. Zakharov

Author Affiliations +

Proceedings Volume 2108, International Conference on Holography, Correlation Optics, and Recording Materials; (1993) https://doi.org/10.1117/12.165405
Event: Holography, Correlation Optics, and Recording Materials, 1993, Chernivsti, Ukraine

Abstract

Diffuse surface relief profile is obtained by contour map generation with the help of multiple- wavelength holography at basic and doubled frequencies of ruby laser. Correlation with etalon may also be produced.

Citation Download Citation

Yuri N. Zakharov "Holographic testing of relief with submicron accuracy", Proc. SPIE 2108, International Conference on Holography, Correlation Optics, and Recording Materials, (10 December 1993); https://doi.org/10.1117/12.165405

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