Unusual features of laser ablation of supported thin films

Tamas Szoerenyi; Zoltan Kantor; Lucien Diego Laude

doi:10.1117/12.184767

7 September 1994 Unusual features of laser ablation of supported thin films

Tamas Szoerenyi, Zoltan Kantor, Lucien Diego Laude

Proceedings Volume 2207, Laser Materials Processing: Industrial and Microelectronics Applications; (1994) https://doi.org/10.1117/12.184767
Event: Europto High Power Lasers and Laser Applications V, 1994, Vienna, Austria

Abstract

Laser ablation of layer structures made of optically and thermally dissimilar materials is markedly different from ablation of homogeneous bulk materials. In the case of supported thin films the ablation characteristics are influenced by the variation of the material properties at the interface. This concept is highlighted by comparing experimental and thermal calculation data on pulsed laser ablation of metal, tin oxide and indium-tin oxide films from glass support to those of characterizing bulk ablation.

Citation Download Citation

Tamas Szoerenyi, Zoltan Kantor, and Lucien Diego Laude "Unusual features of laser ablation of supported thin films", Proc. SPIE 2207, Laser Materials Processing: Industrial and Microelectronics Applications, (7 September 1994); https://doi.org/10.1117/12.184767

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