Object retrieval from the image of textured polycrystalline silicon captured by confocal scanning laser microscope

Abdennaceur Karoui; M. Bouaicha; R. Bennaceur

doi:10.1117/12.179735

8 July 1994 Object retrieval from the image of textured polycrystalline silicon captured by confocal scanning laser microscope

Abdennaceur Karoui, M. Bouaicha, R. Bennaceur

Author Affiliations +

Proceedings Volume 2241, Inverse Optics III; (1994) https://doi.org/10.1117/12.179735
Event: SPIE's International Symposium on Optical Engineering and Photonics in Aerospace Sensing, 1994, Orlando, FL, United States

Abstract

Confocal scanning laser microscopy is a powerful tool for nondestructive investigations. We introduce it to characterize active semiconductor devices. Due to the high resolution of this type of optical microscope, objects are identified with dimensions less than 0.1 micrometers . At this range, the fundamental physical concepts prevent readable images with conventional microscopes. In fact, at these dimensions the diffraction becomes very effective, so that we obtain a noncomprehensible pattern unless we numerically process it. In order to get a readout of the detected signal we use, instead of the deconvolution or Fourier Transforms, a direct method that consists of an explicit calculation of the electrical field of the electromagnetic wave. The amplitude is calculated in all functional planes of the microscope: from the laser source to the object and from this to the CCD camera. We focused our attention on polycrystalline silicon textures and roughness obtained after an anisotropic etching.

Citation Download Citation

Abdennaceur Karoui, M. Bouaicha, and R. Bennaceur "Object retrieval from the image of textured polycrystalline silicon captured by confocal scanning laser microscope", Proc. SPIE 2241, Inverse Optics III, (8 July 1994); https://doi.org/10.1117/12.179735

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available