Paper
1 January 1994 Microtip arrays are electron sources for vacuum microelectronics devices of millimeter and submillimeter wave range
V. D. Yeremko
Author Affiliations +
Proceedings Volume 2250, International Conference on Millimeter and Submillimeter Waves and Applications 1994; 225063 (1994) https://doi.org/10.1117/12.2303236
Event: Millimeter and Submillimeter Waves and Applications: International Conference, 1994, San Diego, CA, United States
Abstract
The results of experimental study of emission from identical metal microtip arrays of the density from 105 to 106 pur mm2, obtained on the base of radiation-chemistry technology, are presented. It is shown that obtained emmission characteristics of such arrays confirm the advisability to use them as emitters in millimeter (mm) and submillimeter (submm) wave sources.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
V. D. Yeremko "Microtip arrays are electron sources for vacuum microelectronics devices of millimeter and submillimeter wave range", Proc. SPIE 2250, International Conference on Millimeter and Submillimeter Waves and Applications 1994, 225063 (1 January 1994); https://doi.org/10.1117/12.2303236
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KEYWORDS
Microelectronics

Extremely high frequency

Metals

Annealing

Chemical elements

Crystals

Etching

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