Design of a new sensor of multiple gases based on the integration of interference filters

Fernando Lopez; Antonio J. de Castro; Juan Melendez; Jesus Meneses

doi:10.1117/12.192172

4 November 1994 Design of a new sensor of multiple gases based on the integration of interference filters

Fernando Lopez, Antonio J. de Castro, Juan Melendez, Jesus Meneses

Proceedings Volume 2253, Optical Interference Coatings; (1994) https://doi.org/10.1117/12.192172
Event: 1994 International Symposium on Optical Interference Coatings, 1994, Grenoble, France

Abstract

The integration of different infrared interference filters on a single substrate to obtain filter arrays is discussed. These arrays, when coupled in the focal plane to linear photodetector arrays, form the so-called `spectral retinae' which permit spectral and spatial resolution with no moving parts. Its application to new multigas sensors based on infrared absorption spectroscopy is also discussed. The different aspects emerging in the integration of specific interference filters are discussed in this paper. Special attention is paid to the problems of compatibility of the different processes involved in the obtention of the integrated filter. The improvement of detection limits for gases of great environmental interest as sulfur dioxide, and nitrogen dioxide is also discussed. Aspects related to the whole conception of the sensor are studied too, mainly those related to the improvement of signal to noise ratio by means of the optimization of the optical parameters. Finally, a new concept for using spectrally selective mirrors in long path optical cells, is proposed. In this way a considerable improvement in simplicity and performance of the spectral retinae can be obtained.

Citation Download Citation

Fernando Lopez, Antonio J. de Castro, Juan Melendez, and Jesus Meneses "Design of a new sensor of multiple gases based on the integration of interference filters", Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); https://doi.org/10.1117/12.192172

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KEYWORDS

Sensors

Gases

Mirrors

Optical filters

Interference filters

NOx

Absorption

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