Next generation mask coordinate measuring technology

Taro Ototake; Masaya Iwasaki

doi:10.1117/12.191925

3 November 1994 Next generation mask coordinate measuring technology

Taro Ototake, Masaya Iwasaki

Proceedings Volume 2254, Photomask and X-Ray Mask Technology; (1994) https://doi.org/10.1117/12.191925
Event: Photomask Japan '94, 1994, Kawasaki City, Kanagawa, Japan

Abstract

As LSI's have become far more highly integrated and the pattern has become much finer, it is demanded in mask production to position the pattern even more accurately. Nikon Corp. currently provides the XY-3i as a mask pattern coordinate measuring machine, but it will not be long before one with even higher accuracy will be required. In this paper, we present two major key technologies to be used for the next-generation coordinate measuring machine. First, we will discuss the problem of coordinate measurement error caused by the flexure of a mask. We will propose a new flexure compensation method based on a concept that is different from what is used for the XY-3i, and report the result of our experiment and simulation to prove that this method is appropriate. Second, we will examine experimentally by what mechanism the temperature fluctuation in the machine may affect the accuracy of measured coordinates, and make clear what will be required to develop the next-generation machine.

Citation Download Citation

Taro Ototake and Masaya Iwasaki "Next generation mask coordinate measuring technology", Proc. SPIE 2254, Photomask and X-Ray Mask Technology, (3 November 1994); https://doi.org/10.1117/12.191925

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available