Technique and application of infrared thermal radiometry in scanning electron microscope

Jianping Yin; Zhiming Wu; Shiqun Zhu; Weijian Gao

doi:10.1117/12.182116

5 August 1994 Technique and application of infrared thermal radiometry in scanning electron microscope

Jianping Yin, Zhiming Wu, Shiqun Zhu, Weijian Gao

Proceedings Volume 2321, Second International Conference on Optoelectronic Science and Engineering '94; (1994) https://doi.org/10.1117/12.182116
Event: Optoelectronic Science and Engineering '94: International Conference, 1994, Beijing, China

Abstract

In this paper, a new technique of scanning electron thermal radiometry (SETR) is proposed. The technique is a combination of microscopic imaging and microarea thermal analysis which are developed from scanning electron microscopy. The characteristics and applications of SETR are discussed.

Citation Download Citation

Jianping Yin, Zhiming Wu, Shiqun Zhu, and Weijian Gao "Technique and application of infrared thermal radiometry in scanning electron microscope", Proc. SPIE 2321, Second International Conference on Optoelectronic Science and Engineering '94, (5 August 1994); https://doi.org/10.1117/12.182116

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