Three-dimensional laser micromachining

Lijun Li

doi:10.1117/12.186058

9 September 1994 Three-dimensional laser micromachining

Lijun Li

Proceedings Volume 2335, Microelectronics Technology and Process Integration; (1994) https://doi.org/10.1117/12.186058
Event: Microelectronic Manufacturing, 1994, Austin, TX, United States

Abstract

Some basic aspects involved in laser micro-machining, like material removal, surface integrity, and dimensional precision, are discussed. Higher surface integrity and lower roughness of the order of submicron can be obtained when both ceramics and metals are machined by an acoustic-optical Q-switched pulse YAG laser. Dimensional precision can be improved by using a focal system with shorter focal depth and by lowering the power density at the focal spot.

Citation Download Citation

Lijun Li "Three-dimensional laser micromachining", Proc. SPIE 2335, Microelectronics Technology and Process Integration, (9 September 1994); https://doi.org/10.1117/12.186058

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