Vacuum photoresists on a base of phenoxazine and their lithographic properties

Vladimir Enokovich Agabekov; Olga Evgenyevna Ignasheva; Yurii Ivanovich Gudimenko; Vladimir N. Belyatsky

doi:10.1117/12.210403

9 June 1995 Vacuum photoresists on a base of phenoxazine and their lithographic properties

Vladimir Enokovich Agabekov, Olga Evgenyevna Ignasheva, Yurii Ivanovich Gudimenko, Vladimir N. Belyatsky

Proceedings Volume 2438, Advances in Resist Technology and Processing XII; (1995) https://doi.org/10.1117/12.210403
Event: SPIE's 1995 Symposium on Microlithography, 1995, Santa Clara, CA, United States

Abstract

The lithographic properties of the vacuum vapour deposited thin films based on the benzo[a]phenoxazine derivatives applied in the "all-dry" lithography process with laser patterning (2 =266nm) have been studied. As shown, film sensitivity and resolution, line-edge profile, dry etch resistance and stability under storage and ion implantation depend highly on the chemical structure of the side substitutes. It was found that the treatment of the films with B and p ions with dose equal to or more than 1.8*10 'ion/cm2 and energy equal to 30 keV results in the formation of thin carbonized surface film layer. Its chemical structure includes phosphorous compounds such as PhP3, (PhO)3P0, (PhO)3P in the case of P ion treatment. Modified films display higher dry etch resistance. The fluorination of the vacuum vapour deposited and modified films in C3F8 plasma is under consideration. Keywords: vacuum vapour deposited organic films, laser photolithography, film surface modification, line-edge element profile, etch resistance, ion implantation.

Citation Download Citation

Vladimir Enokovich Agabekov, Olga Evgenyevna Ignasheva, Yurii Ivanovich Gudimenko, and Vladimir N. Belyatsky "Vacuum photoresists on a base of phenoxazine and their lithographic properties", Proc. SPIE 2438, Advances in Resist Technology and Processing XII, (9 June 1995); https://doi.org/10.1117/12.210403

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available