Capabilities of existing optical laser pattern generator for large area micro images

Manfred K. Stelter

doi:10.1117/12.216798

18 August 1995 Capabilities of existing optical laser pattern generator for large area micro images

Manfred K. Stelter

Proceedings Volume 2622, Optical Engineering Midwest '95; (1995) https://doi.org/10.1117/12.216798
Event: Optical Engineering Midwest '95, 1995, Chicago, IL, United States

Abstract

This paper addresses the materials, processes, and equipment required for large area micro pattern generation as used in the fabrication of display devices. We will point out some of the processing problems in obtaining zero defect patterns and the types of equipment available to obtain the desired result. We will define large area micro images as patterns generated on substrates larger than 8 by 8 inches, having geometries smaller than 0.008 inches.

Citation Download Citation

Manfred K. Stelter "Capabilities of existing optical laser pattern generator for large area micro images", Proc. SPIE 2622, Optical Engineering Midwest '95, (18 August 1995); https://doi.org/10.1117/12.216798

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