Modeling of defect size distribution in yield forecasting

Zhi-Min Ling; Juan Rosal; YungTao Lin; Ying Shiau

doi:10.1117/12.221463

22 September 1995 Modeling of defect size distribution in yield forecasting

Zhi-Min Ling, Juan Rosal, YungTao Lin, Ying Shiau

Proceedings Volume 2635, Microelectronic Manufacturing Yield, Reliability, and Failure Analysis; (1995) https://doi.org/10.1117/12.221463
Event: Microelectronic Manufacturing '95, 1995, Austin, TX, United States

Abstract

The impact of the defect size distribution on yield forecasting is discussed in this work. The fitting parameter p used in traditional defect size distribution modeled at X^-p was studied as a function of the process layer and process time. The importance of an accurate on-line defect size measurement is also discussed.

Citation Download Citation

Zhi-Min Ling, Juan Rosal, YungTao Lin, and Ying Shiau "Modeling of defect size distribution in yield forecasting", Proc. SPIE 2635, Microelectronic Manufacturing Yield, Reliability, and Failure Analysis, (22 September 1995); https://doi.org/10.1117/12.221463

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available