High-efficiency dielectric multilayer gratings optimized for manufacturability and laser damage threshold

Jerald A. Britten; Michael D. Perry; Bruce W. Shore; Robert D. Boyd; Gary E. Loomis; Robert Chow

doi:10.1117/12.240380

27 May 1996 High-efficiency dielectric multilayer gratings optimized for manufacturability and laser damage threshold

Jerald A. Britten, Michael D. Perry, Bruce W. Shore, Robert D. Boyd, Gary E. Loomis, Robert Chow

Proceedings Volume 2714, 27th Annual Boulder Damage Symposium: Laser-Induced Damage in Optical Materials: 1995; (1996) https://doi.org/10.1117/12.240380
Event: Laser-Induced Damage in Optical Materials: 1995, 1995, Boulder, CO, United States

Abstract

Ultrashort pulse, high-intensity lasers offer new opportunities for the study of light-matter interaction and for inertial confinement fusion. A 100 Terawatt laser operating at 400 fs and 1.053 micrometers is operational at LLNL, and a 1000 Terawatt (Petawatt) laser will come online in early 1996. These lasers use large-aperture (40 cm and 94 cm diameter, respectively) diffraction gratings to compress the amplified laser pulse. At present, holographically produced, gold overcoated photoresist gratings are used: these gratings represent the fuse in the laser chain. Higher laser damage thresholds and higher diffraction efficiencies are theoretically possible with multilayer dielectric gratings (MDG's). A number of design parameters regarding both the multilayer stack and the etched grating structure can be optimized to maximize the laser damage threshold and also improve the processing latitude for the interference lithography and reactive ion etching steps used during manufacture of these gratings. This paper presents model predictions for the behavior of hafnia/silica MDG's both during processing and in operation, and presents experimental data on the diffraction efficiency and short-pulse laser damage threshold for optimized witness gratings.

Citation Download Citation

Jerald A. Britten, Michael D. Perry, Bruce W. Shore, Robert D. Boyd, Gary E. Loomis, and Robert Chow "High-efficiency dielectric multilayer gratings optimized for manufacturability and laser damage threshold", Proc. SPIE 2714, 27th Annual Boulder Damage Symposium: Laser-Induced Damage in Optical Materials: 1995, (27 May 1996); https://doi.org/10.1117/12.240380

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available