DOF enhancement effect of attenuated assist feature

Shinji Ishida; Shuichi Hashimoto; Tadao Yasuzato; Kunihiko Kasama

doi:10.1117/12.245202

24 July 1996 DOF enhancement effect of attenuated assist feature

Shinji Ishida, Shuichi Hashimoto, Tadao Yasuzato, Kunihiko Kasama

Proceedings Volume 2793, Photomask and X-Ray Mask Technology III; (1996) https://doi.org/10.1117/12.245202
Event: Symposium on Photomask and X-Ray Mask Technology, 1996, Kawasaki City, Japan

Abstract

To improve the depth of focus (DOF) of isolated lines, attenuated assist feature (AAF) technique has been proposed; AAFs having more than 20 % transmittance were located around an isolated line. In this mask, the transmittance & phase shift angle of AAF as well as its position & width have effects on lithographic performance. In particular, the phase shift angle has strong effect on focus latitude. The performances of two AAF masks (65 % transmittance/ 28° phase shift and 40 % transmittance/ 54° phase shift) were evaluated by using an NA=0.6, σ_in/σ_out = 0.42/0.7, i-line stepper. The focus latitude of 0.3 μm isolated line became flat around the best focus position with 28(degree) phase shift AAFs. In conclusion, we can obtain wide DOF for isolated lines by selecting optimum phase shift angle of AAF.

Citation Download Citation

Shinji Ishida, Shuichi Hashimoto, Tadao Yasuzato, and Kunihiko Kasama "DOF enhancement effect of attenuated assist feature", Proc. SPIE 2793, Photomask and X-Ray Mask Technology III, (24 July 1996); https://doi.org/10.1117/12.245202

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