High-precision submicrometer length measurements by laser interference diffractometry

Larisa Yu. Abramova; Victor M. Baratov; Leonid F. Vitushkin; Artem L. Vitushkin; Vladimir I. Korotkov; Sergey Pul'kin

doi:10.1117/12.239865

6 May 1996 High-precision submicrometer length measurements by laser interference diffractometry

Larisa Yu. Abramova, Victor M. Baratov, Leonid F. Vitushkin, Artem L. Vitushkin, Vladimir I. Korotkov, Sergey Pul'kin

Proceedings Volume 2799, Atomic and Quantum Optics: High-Precision Measurements; (1996) https://doi.org/10.1117/12.239865
Event: International Conference on Coherent and Nonlinear Optics, 1995, St. Petersburg, Russian Federation

Abstract

The new method and new set-up are developed for accurate (approximately 1 divided by 5%) measurement of the width of submicrometer structures (slit, groove, wire). The method is based on the measurement of the shifts of the interference fringes depending on the width of structure. The interference pattern is obtained by interference of the diffracted beams in a two- beam interferometer. The comparison of the shifts of the fringes from reference and investigated width is made.

Citation Download Citation

Larisa Yu. Abramova, Victor M. Baratov, Leonid F. Vitushkin, Artem L. Vitushkin, Vladimir I. Korotkov, and Sergey Pul'kin "High-precision submicrometer length measurements by laser interference diffractometry", Proc. SPIE 2799, Atomic and Quantum Optics: High-Precision Measurements, (6 May 1996); https://doi.org/10.1117/12.239865

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