Beam quality characterization and times-diffraction-limit estimation of two high-power excimer lasers

Sarah Bollanti; Paolo Di Lazzaro; Daniele Murra

doi:10.1117/12.259919

20 November 1996 Beam quality characterization and times-diffraction-limit estimation of two high-power excimer lasers

Sarah Bollanti, Paolo Di Lazzaro, Daniele Murra

Proceedings Volume 2870, Third International Workshop on Laser Beam and Optics Characterization; (1996) https://doi.org/10.1117/12.259919
Event: Third International Workshop on Laser Beam and Optics Characterization, 1996, Quebec City, Canada

Abstract

Based on the results obtained from two high peak power excimer lasers developed in the ENEA Research Centre of Frascati, equipped with different hard-edge unstable resonators, a comparison is made between the widely used M² beam quality parameter and a newly defined 'times- diffraction-limit' (TDL) factor, pointing out the different meaning of the two coefficients, the respective limitations, and their range of applicability. A simple setup for the beam pointing stability estimation is also proposed.

Citation Download Citation

Sarah Bollanti, Paolo Di Lazzaro, and Daniele Murra "Beam quality characterization and times-diffraction-limit estimation of two high-power excimer lasers", Proc. SPIE 2870, Third International Workshop on Laser Beam and Optics Characterization, (20 November 1996); https://doi.org/10.1117/12.259919

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