Optical resolution of phase measurements of laser Fizeau interferometer

Erik Novak; Chiayu Ai; James C. Wyant

doi:10.1117/12.259942

20 November 1996 Optical resolution of phase measurements of laser Fizeau interferometer

Erik Novak, Chiayu Ai, James C. Wyant

Proceedings Volume 2870, Third International Workshop on Laser Beam and Optics Characterization; (1996) https://doi.org/10.1117/12.259942
Event: Third International Workshop on Laser Beam and Optics Characterization, 1996, Quebec City, Canada

Abstract

Accurate interferometric measurement of large laser slabs requires spatial frequencies of 1 mm/cycle to 33 mm/cycle over a 100 mm field of view to be passed by the system with no more than 25% loss in modulation. To eliminate noise and artifacts due to strictly coherent imaging, many commercial interferometers employ a rotating diffuser on an intermediate image plane and relay this image incoherently onto a detector. Unfortunately, this process may adversely affect the resolution of the instrument. Through measurement of a sinusoidal phase grating and fused silica step, the transfer function a laser Fizeau interferometer was measured for both a system with and without the incoherent relay system. Results are compared to those predicted by diffraction theory. Studies of the effects of defocus and propagation on the measurement were also made. Using strictly coherent imaging dramatically increases the system's ability to measure features of high spatial frequency and allows the measurement requirements for laser slabs to be met.

Citation Download Citation

Erik Novak, Chiayu Ai, and James C. Wyant "Optical resolution of phase measurements of laser Fizeau interferometer", Proc. SPIE 2870, Third International Workshop on Laser Beam and Optics Characterization, (20 November 1996); https://doi.org/10.1117/12.259942

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