Room-temperature operation of a YBaCuO microbolometer

Zeynep Celik-Butler; Donald P. Butler; Agha Jahanzeb; John E. Gray; C.M. Travers

doi:10.1117/12.271205

15 April 1997 Room-temperature operation of a YBaCuO microbolometer

Zeynep Celik-Butler, Donald P. Butler, Agha Jahanzeb, John E. Gray, C.M. Travers

Proceedings Volume 2999, Photodetectors: Materials and Devices II; (1997) https://doi.org/10.1117/12.271205
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

Linear arrays of 40 X 40 micrometers ² to 60 X 60 micrometers ² microbolometers utilizing a semiconducting YBaCuO thin film as the IR sensitive material were fabricated and tested. This material displays a high temperature coefficient of resistance at room temperature, which makes it very attractive as an uncooled IR detector. The compatibility of semiconducting YBaCuO with Si micromachining techniques and CMOS technology and its ease of fabrication into thin films is attractive to the fabrication of inexpensive, high performance infrared detectors and imaging arrays. The room temperature responsivity, R_v, of the detectors was measured using 100 Hz chopped broad band infrared radiation to be as high as 10⁴ V/W at 0.8 (mu) A current bias, providing a detectivity of 10⁷ cm Hz^1/2/W. The thermal conductance, G, of the isolation structure was measured to be a relatively high 10^-5 W/K which limited the responsivity of the detector. Since R_v varies as 1/G, the responsivity and hence detectivity may be increased by up to two orders of magnitude by improving the thermal isolation. Zero bias responsivity was also observed on the structures, which was interpreted as pyroelectric IR detection. This was confirmed with independent pyroelectric current measurements.

Citation Download Citation

Zeynep Celik-Butler, Donald P. Butler, Agha Jahanzeb, John E. Gray, and C.M. Travers "Room-temperature operation of a YBaCuO microbolometer", Proc. SPIE 2999, Photodetectors: Materials and Devices II, (15 April 1997); https://doi.org/10.1117/12.271205

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KEYWORDS

Semiconductors

Microbolometers

Sensors

Temperature metrology

Thin films

Resistance

Chlorine

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