Paper
22 January 1997 Integration of GaAs/AlGaAs SQW laser and MQW modulator via a tapered waveguide interconnect without regrowth
Suning Xie, S. Sinha, Ramu V. Ramaswamy
Author Affiliations +
Abstract
A novel monolithic integration of GaAs/AlGaAs single quantum well laser and multiple quantum well modulator via a tapered waveguide interconnect is demonstrated. The integration scheme eliminates the requirement for the material regrowth without sacrificing device design and fabrication flexibility. The key technologies and the performance of the integrated laser-modulator are discussed.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Suning Xie, S. Sinha, and Ramu V. Ramaswamy "Integration of GaAs/AlGaAs SQW laser and MQW modulator via a tapered waveguide interconnect without regrowth", Proc. SPIE 3006, Optoelectronic Integrated Circuits, (22 January 1997); https://doi.org/10.1117/12.264220
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KEYWORDS
Waveguides

Zinc

Modulators

Quantum wells

Annealing

Active optics

Diffusion

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