Distributed micromachined sensor networks

Mark L. Wilson; William R. Herb; David W. Burns; J. David Zook

doi:10.1117/12.273840

25 April 1997 Distributed micromachined sensor networks

Mark L. Wilson, William R. Herb, David W. Burns, J. David Zook

Proceedings Volume 3007, Silicon-Based Monolithic and Hybrid Optoelectronic Devices; (1997) https://doi.org/10.1117/12.273840
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

Researchers at the Honeywell Technology Center are currently developing a new type of high-performance optical sensor which is a `hybrid' micromachined silicon/fiber optic sensor that utilizes the best attributes of each technology. Fiber optics provides a nearly noise free method to read out the sensor without electrical power required at the measurement point. The micromachined silicon STORM (Sensor Transduction by Optically Resonant Microbeams) devices provide a method to design many different types of sensors such as temperature, pressure, acceleration, or magnetic field, and report the sensor data using FM encoding methods. Testing results have demonstrated relaxed alignment tolerance in packaging these devices with excellent SNR. Networks of 16 or more sensors are currently being developed.

Citation Download Citation

Mark L. Wilson, William R. Herb, David W. Burns, and J. David Zook "Distributed micromachined sensor networks", Proc. SPIE 3007, Silicon-Based Monolithic and Hybrid Optoelectronic Devices, (25 April 1997); https://doi.org/10.1117/12.273840

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