Diamondlike carbon films synthesized by electron cyclotron resonance chemical vapor deposition

Mark B. Moran; Linda F. Johnson

doi:10.1117/12.277064

27 June 1997 Diamondlike carbon films synthesized by electron cyclotron resonance chemical vapor deposition

Mark B. Moran, Linda F. Johnson

Proceedings Volume 3060, Window and Dome Technologies and Materials V; (1997) https://doi.org/10.1117/12.277064
Event: AeroSense '97, 1997, Orlando, FL, United States

Abstract

The preceding paper in these proceedings provided a detailed discussion of colloidal and crystalline-phase chlorine-doped carbon nitride (CN_x:Cl) films synthesized by electron cyclotron resonance (ECR) chemical vapor deposition (CVD). This paper focuses on diamond-like carbon (DLC) and hydrogenated carbon-nitride (CN_x:H) films deposited by ECR-CVD in either a nitrogen- or an argon-high-density plasma using one of the following hydrocarbon precursors; trichloroethylene, tetrachloroethylene, neopentane or ethylene. For clarity, results and discussions for the CN_x:Cl deposits are presented again. Electron spectroscopy for chemical analysis (ESCA) and Fourier transform infrared (FTIR) spectroscopy show that the ECR-CVD experiments so far have resulted in four distinctly different chemical compositions; CN_x:Cl, CN_x:H, hydrogenated amorphous carbon (a-C:H) and chlorine-doped amorphous carbon (a-C:Cl). The a-C:H films deposited from neopentane and nitrogen have the lowest refractive index and the highest bandgap. The a-C:Cl films exhibit a strong infrared peak at about 1560 cm^-1 indicating that they may contain a large amount of microcrystalline graphite.

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Mark B. Moran and Linda F. Johnson "Diamondlike carbon films synthesized by electron cyclotron resonance chemical vapor deposition", Proc. SPIE 3060, Window and Dome Technologies and Materials V, (27 June 1997); https://doi.org/10.1117/12.277064

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