Application of generalized ellipsometry to complex optical systems

Mathias Schubert; Bernd Rheinlaender; John A. Woollam; Blaine D. Johs; Craig M. Herzinger

doi:10.1117/12.271823

1 April 1997 Application of generalized ellipsometry to complex optical systems

Mathias Schubert, Bernd Rheinlaender, John A. Woollam, Blaine D. Johs, Craig M. Herzinger

Proceedings Volume 3094, Polarimetry and Ellipsometry; (1997) https://doi.org/10.1117/12.271823
Event: Polarimetry and Ellipsometry, 1996, Kazimierz Dolny, Poland

Abstract

We report the extension of the spectroscopic rotating- analyzer-ellipsometry to generalized ellipsometry (GE) in order to define and to determine three essentially normalized elements of the optical JONES matrix J. These elements can be measured in reflection or transmission arrangement regardless of the specific structural and/or anisotropic properties of a particular sample. A 4 by 4- matrix algebra has ben presented for electromagnetic plane waves reflected or transmitted at arbitrarily anisotropic and homogeneous layered systems including a special solution for continuously twisted biaxial materials. This algorithm has a general approach for materials with linear optical response behavior. The optical JONES matrix represents the experimental link to the 4 by 4-matrix algebra. The combination of both, the 4 by 4-matrix algorithm and GE allows for the analysis of complex layered samples containing anisotropic materials. We report on the application of GE to birefringent dielectrics, chiral liquid crystals and spontaneously ordered III-V compounds. From a regression analysis we obtain the intrinsic optical properties of the anisotropic materials.

Citation Download Citation

Mathias Schubert, Bernd Rheinlaender, John A. Woollam, Blaine D. Johs, and Craig M. Herzinger "Application of generalized ellipsometry to complex optical systems", Proc. SPIE 3094, Polarimetry and Ellipsometry, (1 April 1997); https://doi.org/10.1117/12.271823

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