Research of oxidation processes of a cadmium telluride film surface by ellipsometric method

Lubov A. Zabashta; A. S. Opanasyuk; V. I. Kharchenko

doi:10.1117/12.271834

1 April 1997 Research of oxidation processes of a cadmium telluride film surface by ellipsometric method

Lubov A. Zabashta, A. S. Opanasyuk, V. I. Kharchenko

Proceedings Volume 3094, Polarimetry and Ellipsometry; (1997) https://doi.org/10.1117/12.271834
Event: Polarimetry and Ellipsometry, 1996, Kazimierz Dolny, Poland

Abstract

Kinetics of formation of an oxide on the CdTe surface was investigated during a sample exposition in air at temperatures T_h equals 20 degrees C, 260 degrees C, 340 degrees C, 420 degrees C, for 200 hours. For nonoxide CdTe surface the following values of optical constants n_s equals 2.6 and k_s equals 0.6 are received. At a exposition of samples at room temperature a refractive index of an oxide film changed from n_f equals 1.7 at initial stages of growth up to n_f equals 2.37 after 200 hours oxidation. At all stages of oxidation process the monotone reduction of a refractive index of oxide layers at an increase of heating temperature is found out. During natural oxidation oxide layer thickness reaches 1.8 nm in the course of 20 hours. Hereafter oxide formation speed decreases that results in stabilization of its thickness. It is shown that the growth of the oxide phase is descried with the parabolic law and is checked with diffusion processes. To determine the energy of oxidation process activation the charts of dependence of logarithm of oxide film thickness upon inverse temperature at constant oxidation time were built. The presence of two areas of heating temperatures with different energy of oxidation process activation is established. The parameters of kinetic equation are determined which describe oxide film growth in low temperature and high temperature fields.

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Lubov A. Zabashta, A. S. Opanasyuk, and V. I. Kharchenko "Research of oxidation processes of a cadmium telluride film surface by ellipsometric method", Proc. SPIE 3094, Polarimetry and Ellipsometry, (1 April 1997); https://doi.org/10.1117/12.271834

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