Thin-film analysis based on the ratio of envelopes of the reflectance spectra measured at two incident angles

Valery N. Filippov

doi:10.1117/12.271839

1 April 1997 Thin-film analysis based on the ratio of envelopes of the reflectance spectra measured at two incident angles

Valery N. Filippov

Author Affiliations +

Proceedings Volume 3094, Polarimetry and Ellipsometry; (1997) https://doi.org/10.1117/12.271839
Event: Polarimetry and Ellipsometry, 1996, Kazimierz Dolny, Poland

Abstract

Absolute reflectivity measurements are needed for the determination of optical parameters and the thickness of a film on an absorbing substrate by method of envelopes. In the article the ratio of minima and maxima envelopes of the reflectance spectra is introduced. This parameter allows to avoid absolute measurements. An application of the ratio measurements for the analysis of isotropic absorbing homogeneous films is described. Provided the film is transparent, the approach proposed leads to the simple analytical solution of an inverse problem.

Citation Download Citation

Valery N. Filippov "Thin-film analysis based on the ratio of envelopes of the reflectance spectra measured at two incident angles", Proc. SPIE 3094, Polarimetry and Ellipsometry, (1 April 1997); https://doi.org/10.1117/12.271839

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available