Photoreflectance spectroscopy of Si surface delta doping on GaAs (001)

Mingfang Wan; Xingquan Liu; Xiaoshuang Chen; Wei Lu; Shuechu Shen

doi:10.1117/12.300663

20 February 1998 Photoreflectance spectroscopy of Si surface delta doping on GaAs (001)

Mingfang Wan, Xingquan Liu, Xiaoshuang Chen, Wei Lu, Shuechu Shen

Proceedings Volume 3175, Third International Conference on Thin Film Physics and Applications; (1998) https://doi.org/10.1117/12.300663
Event: Third International Conference on Thin Film Physics and Applications, 1997, Shanghai, China

Abstract

Photoreflectance (PR) spectroscopy system is combined with molecular beam epitaxy (MBE) to accomplish in-situ PR measuring of the Si surface (delta) doping on GaAs (001) with different concentrations at different temperatures. The features observed on the high-energy side of the fundamental gap are attributed to transitions involving electronic subbands in the half V-shaped potential well. We find that the Si (delta) -doping-related spectral structure first shifts to high energy side with the doping concentration increasing, then almost stop shifting with the doping concentration higher than 2.4 X 10¹⁴ cm^-2 when temperature increases, at certain doping concentration the Si (delta) - doping-related transition shifts toward low energy side. The dependence of the transition on doping concentration is well explained by using a simple theoretical model.

Citation Download Citation

Mingfang Wan, Xingquan Liu, Xiaoshuang Chen, Wei Lu, and Shuechu Shen "Photoreflectance spectroscopy of Si surface delta doping on GaAs (001)", Proc. SPIE 3175, Third International Conference on Thin Film Physics and Applications, (20 February 1998); https://doi.org/10.1117/12.300663

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available