Polymerized-film replication of micro-optics elements

Lin Pang; Bo Chen; Lurong Guo; Hongjun Zeng; Weijian Tian

doi:10.1117/12.300709

20 February 1998 Polymerized-film replication of micro-optics elements

Lin Pang, Bo Chen, Lurong Guo, Hongjun Zeng, Weijian Tian

Proceedings Volume 3175, Third International Conference on Thin Film Physics and Applications; (1998) https://doi.org/10.1117/12.300709
Event: Third International Conference on Thin Film Physics and Applications, 1997, Shanghai, China

Abstract

A new method for replicating microstructure elements is presented. The principle and technological process of the method are introduced. For one polymer, deep binary relief grating on quartz substrate is replicated by using this new method and the relief-transfer efficiency and transparency are measured. The results show that the replicas are of high fidelity of profile and are suitable for practical applications.

Citation Download Citation

Lin Pang, Bo Chen, Lurong Guo, Hongjun Zeng, and Weijian Tian "Polymerized-film replication of micro-optics elements", Proc. SPIE 3175, Third International Conference on Thin Film Physics and Applications, (20 February 1998); https://doi.org/10.1117/12.300709

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