Rapid in-fab monitoring of ion implant doses using total x-ray fluorescence

Cornelia A. Weiss; Tim Z. Hossain; Ehrenfried Zschech; Brian J. MacDonald

doi:10.1117/12.284675

2 September 1997 Rapid in-fab monitoring of ion implant doses using total x-ray fluorescence

Cornelia A. Weiss, Tim Z. Hossain, Ehrenfried Zschech, Brian J. MacDonald

Proceedings Volume 3215, In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing; (1997) https://doi.org/10.1117/12.284675
Event: Microelectronic Manufacturing, 1997, Austin, TX, United States

Abstract

Total reflection X-ray fluorescence (TXRF) is a useful tool for rapid, nondestructive monitoring of implant doses in semiconductor manufacturing. For As-doped (10 keV and 80 keV) Si wafers with an implant dose of 3 X 10¹⁵ at/cm², As fluorescence yield and accumulated As+ dose measured by Secondary Ion Mass Spectroscopy (SIMS) have been compared. This comparison between TXRF and SIMS demonstrates the power of TXRF as a new nondestructive technique for in-line shallow implant dose and profile monitoring.

Citation Download Citation

Cornelia A. Weiss, Tim Z. Hossain, Ehrenfried Zschech, and Brian J. MacDonald "Rapid in-fab monitoring of ion implant doses using total x-ray fluorescence", Proc. SPIE 3215, In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing, (2 September 1997); https://doi.org/10.1117/12.284675

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available