High-precision positioning stages for micro- and nanolithography

Donald Croft; Santosh Devasia

doi:10.1117/12.284555

2 September 1997 High-precision positioning stages for micro- and nanolithography

Donald Croft, Santosh Devasia

Proceedings Volume 3225, Microlithography and Metrology in Micromachining III; (1997) https://doi.org/10.1117/12.284555
Event: Micromachining and Microfabrication, 1997, Austin, TX, United States

Abstract

Low scanning speed as well as hysteresis nonlinearities have been fundamental limitations of scanning probe based micro/nano-fabrication techniques. Scanning speeds are typically limited to about 1/10th the fundamental vibrational mode of the piezo-positioning system while hysteresis nonlinearities cause significant errors in large- range positioning applications. This paper presents a method to achieve higher scan rates by using inversion of the piezo-actuator dynamics as well as by compensating for the hysteresis nonlinearities. The approach decouples the inversion into (a) inversion of the hysteresis nonlinearities and (b) inversion of the structural dynamics, to find an input voltage profile that achieves precision tracking of a desired scan trajectory. The results show that an order of magnitude increase in scanning speed is achieved, while maintaining precision tracking of the desired scan path.

Citation Download Citation

Donald Croft and Santosh Devasia "High-precision positioning stages for micro- and nanolithography", Proc. SPIE 3225, Microlithography and Metrology in Micromachining III, (2 September 1997); https://doi.org/10.1117/12.284555

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available