Visualization of high-frequency surface acoustic wave propagation using stroboscopic phase-shift interferometry

Ken Nakano; Akihiro Torii; Kazuhiro Hane; Shigeru Okuma

doi:10.1117/12.284553

2 September 1997 Visualization of high-frequency surface acoustic wave propagation using stroboscopic phase-shift interferometry

Ken Nakano, Akihiro Torii, Kazuhiro Hane, Shigeru Okuma

Author Affiliations +

Proceedings Volume 3225, Microlithography and Metrology in Micromachining III; (1997) https://doi.org/10.1117/12.284553
Event: Micromachining and Microfabrication, 1997, Austin, TX, United States

Abstract

A stroboscopic phase-shift interferometry is applied to visualize the high-frequency microvibration of a surface acoustic wave (SAW) devices quantitatively. The Fizeau-type interferometry is realized with a multi-mode semiconductor laser diode and an optical isolator. With the laser light illuminating stroboscopically, observed interference intensity gives information about average displacements of the vibrations. Distribution of the 50 MHz SAW propagation along the propagation path has been observed. The measured amplitude of the vibration is 3 nm. Repetition accuracy evaluated with the root mean square method is 1.2500 of the laser wavelength. This method is useful for estimating and improving performances of microdevices.

Citation Download Citation

Ken Nakano, Akihiro Torii, Kazuhiro Hane, and Shigeru Okuma "Visualization of high-frequency surface acoustic wave propagation using stroboscopic phase-shift interferometry", Proc. SPIE 3225, Microlithography and Metrology in Micromachining III, (2 September 1997); https://doi.org/10.1117/12.284553

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