Combined photonics and MEMS function demonstration

Olga Blum-Spahn; Mial E. Warren; Hong Q. Hou; Richard Franklin Carson; Kent D. Choquette; M. Steven Rodgers; Jeffry J. Sniegowski

doi:10.1117/12.305469

20 April 1998 Combined photonics and MEMS function demonstration

Olga Blum-Spahn, Mial E. Warren, Hong Q. Hou, Richard Franklin Carson, Kent D. Choquette, M. Steven Rodgers, Jeffry J. Sniegowski

Author Affiliations +

Proceedings Volume 3286, Vertical-Cavity Surface-Emitting Lasers II; (1998) https://doi.org/10.1117/12.305469
Event: Optoelectronics and High-Power Lasers and Applications, 1998, San Jose, CA, United States

Abstract

We discuss tow examples of integration of micro- electromechanical system (MEMs) and a photonic device. In the first instance, a MEMs locking device pin is driven by a voltage generated by photovoltaic cells connected in series, which are driven by a laser. In the second case, a VCSEL emitting at 1.06 micrometers is packaged together with a metallized MEMs shutter. By appropriate alignment to the opening in the shutter, the VCSEL is turned on and off by the movement of the Si chopper wheel.

Citation Download Citation

Olga Blum-Spahn, Mial E. Warren, Hong Q. Hou, Richard Franklin Carson, Kent D. Choquette, M. Steven Rodgers, and Jeffry J. Sniegowski "Combined photonics and MEMS function demonstration", Proc. SPIE 3286, Vertical-Cavity Surface-Emitting Lasers II, (20 April 1998); https://doi.org/10.1117/12.305469

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