High-temperature pressure transducer interface

Paul C. de Jong; Gerard C. M. Meijer

doi:10.1117/12.320180

20 July 1998 High-temperature pressure transducer interface

Paul C. de Jong, Gerard C. M. Meijer

Proceedings Volume 3328, Smart Structures and Materials 1998: Smart Electronics and MEMS; (1998) https://doi.org/10.1117/12.320180
Event: 5th Annual International Symposium on Smart Structures and Materials, 1998, San Diego, CA, United States

Abstract

This paper describes a high-temperature (250 degree(s)C) pressure-transducer interface for resistive Wheatstone bridges. The long-term drift of the smart sensor, i.e., the (pressure) sensor plus its interface electronics, will be determined by the drift of the sensor only. A continuous three-signal auto-calibration sequence of the interface electronics keeps the transducer interface virtually free of long-term drift. A patented low-drift pre-amplifier forms an essential element in this system. The high-temperature operation of the transducer interface has been investigated from both an electronic and a packaging point of view. The system has been realized by combining CMOS ASICs with a thick-film packaging technology. The pressure-transducer interface works up to 250 - 275 degree(s)C with 15 - 16 bits accuracy.

Citation Download Citation

Paul C. de Jong and Gerard C. M. Meijer "High-temperature pressure transducer interface", Proc. SPIE 3328, Smart Structures and Materials 1998: Smart Electronics and MEMS, (20 July 1998); https://doi.org/10.1117/12.320180

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