Thin-film transistor array technology for high-performance direct-conversion x-ray sensors

Willem den Boer; Steven Aggas; Young H. Byun; Tieer Gu; Johnny Q. Zhong; Scott V. Thomsen; Lothar S. Jeromin; Denny L. Y. Lee

doi:10.1117/12.317054

24 July 1998 Thin-film transistor array technology for high-performance direct-conversion x-ray sensors

Willem den Boer, Steven Aggas, Young H. Byun, Tieer Gu, Johnny Q. Zhong, Scott V. Thomsen, Lothar S. Jeromin, Denny L. Y. Lee

Author Affiliations +

Proceedings Volume 3336, Medical Imaging 1998: Physics of Medical Imaging; (1998) https://doi.org/10.1117/12.317054
Event: Medical Imaging '98, 1998, San Diego, CA, United States

Abstract

Thin Film Transistor (TFT) array technology is presented for Digital X-ray Sensors in Direct Radiography applications. Circuit simulations were performed to optimize the design of the TFT array. The sensor array uses a combination of a mushroom electrode with a high fill factor of 86% and a polymer passivation dielectric to minimize column capacitance and improve signal-to-noise ratio. A 14 in. X 8.5 in. sensor array with 1536 X 2560 pixels was developed using this technology. The TFT arrays are processed entirely in Class 1 clean room environments to eliminate line defects and minimize pixel defects. The best 14 in. X 8.5 in. panels have exhibited fewer than 0.001% pixel defects, as detected during in process testing prior to Se coating. In typical image quality comparisons with conventional X-ray film/screen combinations, the digital X-ray sensor exhibited equal or better performance than film-screens. Clinical studies were also conducted. Radiologists concluded that diagnostically significant projection radiographic images can be produced with the new digital X-ray sensor that are equivalent or superior to conventional film/screen images at the same X-ray exposures. The detector recently received FDA approval.

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Willem den Boer, Steven Aggas, Young H. Byun, Tieer Gu, Johnny Q. Zhong, Scott V. Thomsen, Lothar S. Jeromin, and Denny L. Y. Lee "Thin-film transistor array technology for high-performance direct-conversion x-ray sensors", Proc. SPIE 3336, Medical Imaging 1998: Physics of Medical Imaging, (24 July 1998); https://doi.org/10.1117/12.317054

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