Characterization of layered structures by photoacoustic piezoelectric technique

Margarita L. Shendeleva

doi:10.1117/12.306266

20 April 1998 Characterization of layered structures by photoacoustic piezoelectric technique

Margarita L. Shendeleva

Proceedings Volume 3359, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997; (1998) https://doi.org/10.1117/12.306266
Event: International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, 1997, Kiev, Ukraine

Abstract

A thermoelastic response that arises in a two-layered wafer under its heating by periodically modulated light beam has been studied theoretically. For the case of piezoelectric detection of the signal an analytical expression for the output voltage of the transducer has been obtained which allows to calculate the amplitude and phase characteristics versus modulation frequency. It is shown that these characteristics vary strongly depending on thermal and elastic properties of both layers.

Citation Download Citation

Margarita L. Shendeleva "Characterization of layered structures by photoacoustic piezoelectric technique", Proc. SPIE 3359, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997, (20 April 1998); https://doi.org/10.1117/12.306266

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